SYNTHESIS AND CHARACTERIZATION OF THIN FILMS OF ZINC OXIDE DOPADED WITH ALUMINUM
AZO, TCO, Magnetron Sputtering, Thins Films
The purpose of this work was to synthesize and characterize zinc oxide doped with aluminum (AZO) for making ceramic targets to be used in the deposition of conductive thin films (TCO) deposited on glass substrate using the sputtering technique magnetron sputtering DC, which is a very suitable technique for obtaining dense and uniform thin films. In carrying out the work, parameters were varied, such as deposition time and gas flow, to observe the influence on the optical and electrical properties of AZO films. The characteristics of the thin films obtained were performed using X-Ray Diffraction (XRD) techniques that show a preferential growth of the structure in (100), (002), (101), (102) and (103) directions of the structure hexagonal crystallography of ZnO, optical transmittance measurements in the region of the visible spectrum and the four-point method. The results showed that the films obtained a good optical transmittance, above 80% in the film and a low resistivity value. Characterizing it as a transparent conductive oxide.