OBTAINING AND STUDYING THE BEHAVIOR OF MULTILAYER TiSiN/TiSiC THIN FILM DEPOSITED ON AISI 4340 STEEL USING THE PLASMA DEPOSITION TECHNIQUE IN CATHODE CYLINDERS
Multilayers, TiSiN/TiSiC, Cathode Cylinders, Mechanical Properties, Tribological Behavior.
Thin films are layers of material deposited to improve substrate properties, such as mechanical, tribological and corrosion resistance. The cathode cylinder plasma treatment (CCyPD) technique is an innovative approach in the formation of thin films. However, there are few studies on this technique, which makes this field of research promising. Furthermore, to date there is no literature available on the application of thin film multilayers using the CCyPD technique, and it is important to highlight that this is the first study carried out. In this sense, the objective of this study was to obtain and characterize
TiSiN/TiSiC multilayer thin films deposited on the AISI 4340 steel substrate using the CCyPD method, evaluating the mechanical and tribological properties of the resulting multilayer films. The study used AISI 4340 steel as a substrate and cylinders produced from titanium (Ti) and silicon (Si) powders. To deposit the TiSiN/TiSiC multilayer coatings, the CCyPD technique was applied. The plasma treatment was carried out keeping the potential fixed and varying the time, temperature and proportion of gases per layer deposited. After treatment, the samples were characterized by: X-ray Diffraction (XRD) with grazing incidence, Raman spectroscopy, Scanning Electron Microscopy with Field Emission (SEM-FEG) with Energy Dispersive Spectroscopy (EDS), microhardness and tribological (friction coefficient and wear volume) and profilometry analysis (surface roughness). The results revealed the obtaining of layers of the films deposited with the phases present in the multilayer compounds, as well as the vibrational bands. The SEM-FEG showed that the coating is composed of alternating layers of TiSiN/TiSiC, with adhesion to the substrate. EDS analysis revealed the elemental composition of the multilayers, with the presence of Ti, Si, N and C. In terms of mechanical properties, the hardness values
indicated a significant surface increase of the coated samples, compared to the uncoated sample. The tribological behavior demonstrated that the multilayer films presented low friction coefficients, and a reduction in wear volume compared to the uncoated substrate. It is concluded that the CCyPD technique proved to be efficient for depositing thin films of TiSiN/TiSiC multilayers on the AISI 4340 steel substrate. The results indicated that the multilayers presented high hardness,
low coefficient of friction and superior wear resistance to uncoated substrate. Therefore, this demonstrates the effectiveness of using the technique in the deposition of TiSiN/TiSiC multilayer thin films, which directly impacts surface engineering and the development of high-performance coatings.